| Application • Surface cleaning and activation • Resin and contaminant removal • Material etching, ashing ….. |
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Application to glueing, printing, analysis, optics, hybrids, wafer manufacturing, polymer industry..
Description
NT family from BSET EQ includes 3 machines with different chamber sizes
(20, 50 and 100 litres)
and dedicated to R&D, laboratory or Production applications
Main features
• Parallel shelves design
• Shelves positionning for Direct, Down stream or ‘RIE’ plasma
• 13.56 MHz / 600 Watts RF generator with automatic tunning
• Chamber and shelves configuration minimize influence of sidewalls
• 2 gas channels (4 as option) with Mass Flow Controllers
• Fully computer controlled (PC Windowstm)
• Unlimited process storage
• Automatic sequencing of operations
• Multi step processes available
• User friendly interface (English or French)
